Download Nanoscale Calibration Standards and Methods: Dimensional and by Ganter Wilkening, Ludger Koenders PDF

By Ganter Wilkening, Ludger Koenders

The quantitative choice of the homes of micro- and nanostructures is key in examine and improvement. it's also a prerequisite in technique regulate and caliber insurance in undefined. the data of the geometrical dimensions of buildings normally is the bottom, to which different actual and chemical houses are associated. Quantitative measurements require trustworthy and solid tools, appropriate size methods in addition to applicable calibration artefacts and techniques. The seminar "NanoScale 2004" (6th Seminar on Quantitative Microscopy and second Seminar on Nanoscale Calibration criteria and techniques) on the nationwide Metrology Institute (Physikalisch-Technische Bundesanstalt PTB), Braunschweig, Germany, keeps the sequence of seminars on Quantitative Microscopy. The sequence stimulates the trade of knowledge among brands of appropriate tough- and software program and the clients in technological know-how and industry.Topics addressed in those complaints are a) the applying of quantitative measurements and dimension difficulties in: microelectronics, microsystems know-how, nano/quantum/molecular electronics, chemistry, biology, medication, environmental know-how, fabrics technological know-how, floor processingb) calibration & correction tools: calibration equipment, calibration criteria, calibration strategies, traceable measurements, standardization, uncertainty of measurementsc) instrumentation and strategies: novel/improved tools and strategies, reproducible probe/sample positioning, position-measuring platforms, novel/improved probe/detector platforms, linearization tools, snapshot processing

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Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro- and Nanometer Range

The quantitative decision of the homes of micro- and nanostructures is key in study and improvement. it's also a prerequisite in approach keep watch over and caliber insurance in undefined. the data of the geometrical dimensions of buildings often is the bottom, to which different actual and chemical homes are associated.

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Hasche, R. Seemann, and K. Thiele, A metrological scanning force microscope used for coating thickness and other topographical measurements, Appl. Phys. A 66, 837–842 (1998). K. Hasche, K. Herrmann, W. Mirand, R. Seemann, L. Vitushkin, M. Xu, and G. Yu, Calibrated scanning force microscope with capabilities in the subnanometre range, Surf. Interface Anal. 33, S. 71–74 (2002). L. , Comparison on nanometrology – NANO2: step height, Metrologia 40, 04001 (2003). K. Herrmann, W. Mirand, K. Hasche, and F.

14 M. Tortonese, R. C. Barrett, and C. F. Quate, Atomic resolution with an atomic force microscope using piezoresistive detection, Appl. Phys. Lett. 62, 834–836 (1993). 15 R. Jumpertz, J. Schelten, O. Ohlsson, and F. Saurenbach, Bridge configuration of piezoresistive devices for scanning force microscopes, Sensors Actuators A 70, 88–91 (1998). 16 C. Dal Savio, Th. Dziomba, D. V. -U. Danzebrink, Entwicklung eines kombinierten Nahfeldmikroskopie- 17 18 19 20 21 22 23 24 25 26 und -spektroskopiesystems, PTB-Bericht F-47, S.

13 14 1 Metrological Scanning Probe Microscopes – Instruments for Dimensional Nanometrology Fig. 8 View of the SFM Veritekt C. ment of the laser interferometers was revised in such a way that it is now also possible to adapt measuring heads working in different SFM modes. Contrary to the measuring strategy used for Veritekt B, in which the laser interferometers are used for calibration of the capacitive sensors at discrete measurement points (l/2 zero points of the interferometer signals) and calculation of correction values, Veritekt C directly includes the interferometer values in the SFM’s control loop.

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